Advanced Clean-Monitoring for the Manufacturing Field:
Is that booth really clean?
Is clean air with a filter enough to maintain a clean environment?
Clean measures are not perfect unless they are tied to quality.
Localized Continuous Clean-Monitoring Systems by OMRON provide many ways to improve quality and enable perfect reporting of production process monitoring.
Applications
- Electronic Component Production Processes Multi-Clean Control
- Cell Production Processes Direct Clean Control
- Storage and Test Environments Storage of Precision and Optical Components
Total Sensing for Clean Booths:
OMRON provides the optimum clean environment with constant monitoring of continuously changing production environments. Sensing and control with up to 9 Air Clean Units. The degree of cleanliness in each production stage can be controlled in relation to quality.
Continuous Sensing of Particles:
The particle volume inside booths is constantly sensed by an Air Particle Sensor. Optimum clean environments are maintained by controlling air volume based on particle volume — from rapid ventilation to energy-conserving gradational air volume control.
Rapid Feedback:
The maximum and minimum air volume and feedback time can be set to any desired values. Once a cleanliness threshold has been exceeded, the level of cleanliness can be increased in a short time by applying the maximum air volume.
Constant Feedback:
Constant feedback is provided so that the cleanliness threshold is not exceeded. A constant level of cleanliness is always maintained and energy is conserved.
Ionized Clean Environments:
An Ionizer is needed to remove dust attached to particles by static electricity. OMRON provides a new style for discharging and dust removal, with the first Ionizers in the industry that can be combined with Air Clean Units.
Compact but High-Perfomance Air Clean Unit:
Slimmest in the industry: 97.5 mm:
High-Speed Dust Control:
Unique Twin-fan Construction:
A unique ZNA2502 Twin-Fan construction enables both a slimmer body and a greater air volume. Downsizing is possible with a greater level of capacity than previous models.
HEPA Filter with High Filtration:
The HEPA filter used with the ZN Series has the capacity to filter 99.99% of 0.3 µm particles.
Laminar Airflow Design:
The smaller fan section and the unique ventilation construction design provides a more uniform laminar airflow. Uniform air is provided over a wide area.
Airflow Switching Function:
The air volume can be set to 5 different levels, from 0.3 to 1.8 m3/min for the ZN-A2502 and 1.0 to 5.0 m3/min for the ZN-A4105. The air volume can be checked with the large indicators in the middle.
Self-diagnosis Function:
Two LED indicators indicate operation errors (e.g., stopped fans) and when HEPA filter replacement is required. Located on two corners of the Unit, the LED indicators are visible from many angle.
External I/O:
An I/O interface is built in.
An AC adapter or 24-VDC input can be selected for the power supply.
An alarm signal is output if the self-diagnosis function indicates HEPA filter replacement or error operation.
Ultra-Easy Maintenance:
HEPA filters can be replaced without tools thanks to the use of buckles. Onsite maintenance time is reduced because filters can be replaced in a one-step operation.
Unique and Easy Ionizer for Air Clean Unit:
Industry First:
Ionizer That Can be Combined with Air Clean Units 
Laminar airflow can be disrupted with bar-type Ionizers, depending on where the Ionizer is installed, and too much installation work is required.
The Ionizer can be mounted directly to the Air Clean Unit.
Opening Constructed Not to Obstruct Laminar Airflow:
The opening does not obstruct the airflow from the Air Clean Unit eliminating worries about disrupting the laminar airflow.
Clean Sensing System:
Wide Discharge Area by Adopting Variable DC Ionization Method:
Variable DC ionization is used to discharge over a wide area.
Automatic Ion Balance:
Two Sensors provide constant feedback on the ion balance to maintain uniform discharging.
- Self-diagnosis and Display Functions:
LED indicators and external outputs provide notification when discharge needles require cleaning or discharge errors occur. Cleaning outputs are made at two levels: warnings and alarms.
- Ozone Buildup Prevention:
Discharging is stopped when a signal indicating that the Air Clean Unit fan has stopped is received. This function prevents ozone from remaining due to discharging. - Simple Mounting and Wiring:
The Ionizer can be installed easily by inserting it between the Air Clean Unit and the top of the Clean Booth and securing it with screws. Wiring work is greatly reduced by the connectors used for connection to the Air Clean Unit.
- Simple Maintenance:
Discharge needles are modular and can be easily replaced.
Small Size, Continuous Measurement In-line Air Particle Sensor:
Smallest in the Industry
Air Particle Sensor for In-line Measurement:
A high-performance fan for external air suction enables constant measuring over long periods. Semiconductor lasers and high-sensitivity optical design in the sensing section enable measurement of 0.3-µm particles.
Measurement Principle:
A semiconductor laser beam is targeted on to the air intake and the light is scattered when particles pass through that beam. The scattered light is received by the light receiving element and converted to an electrical signal.
Particle Trend Indicator:
The sensing section has a particle trend display for quick visual confirmation of the degree of cleanliness. The Amplifier provides numeric indication of the number of 0.3-, 0.5-, and 1.0-µm particles.
A signal can be output at any level of particles if a threshold has been set.
Clean Sensing System:
On-screen Indication and Data Logging of Particle Amount:
Measurement values can be easily logged on a personal computer by using the Interface Unit and special software (sold separately).Data from sequential sensing of particles can be used to improve quality.
- Realtime Clean Air Monitor:
A variety of displays (including color graphs for visual confirmation by color of particle densities, indication of the number of particles, and trend graphs) can be set. Particle Sensors and Interface Units can also be set from the personal computer. Measurement data is logged in realtime and can be manipulated in CSV-format files using spreadsheet software.
Quality Control with Multi-point Measurement:
Up to ten Particle Sensors and up to nine Air Clean Units can be controlled through one Interface Unit and Real Time Clean Air Monitor. There are no time-consuming restrictions, such as the order that power is turned ON. The level of cleanliness can be controlled for each process and constant monitoring is possible in relation to quality data.
For In-line Applications:
Installation is simple with DIN Track mounting.The In-line Air Particle Sensor was developed for in-line applications, with a 24-VDC power supply.
External outputs can be at two levels: warnings and alarms. Suitable for in-line trend management applications.
For In-line Applications:
System Connection Diagram:
There are four ways of using the In-line Air Particle Sensor, depending on the application.
- Measurement and Logging of Particle Volumes:
Particle volumes are logged and warnings or alarms are output for set thresholds.
- Clean Air Supply and Discharging:
Discharging can be performed with the downflow from the Air Clean Unit.
- Direct Clean Sensing Systems:
The air volume of the Air Clean Unit is automatically adjusted while the particle volume is measured and logged.
- Multi-Clean Sensing Systems:
The air volume of the Air Clean Unit is automatically adjusted while the particle volume is measured and logged.
The level of cleanliness can be managed and feedback controlled for more than one production process.
Ordering Information:
Air Clean Units
- Air Clean Units
| Appearance | Application | Power supply | Model | |
 | 250 × 250 mm | 24 VDC | ZN-A2502D * | |
| 410 × 410 mm | ZN-A4105D * | ||
| ZN-A6112 | ||||
| 610 × 610 mm | ||||
| ZN-A6112P * |
- Accessories
| Applicable Air Clean Unit | Model | Qty. | |
| Replacement HEPA Filters | For 250 × 250 mm | ZN9-AHP25 | 1 |
| For 410 × 410 mm | ZN9-AHP41 | 1 | |
| For 610 × 610 mm | ZN9-AHP61 | 1 | |
| Replacement Prefilters | For 250 × 250 mm | ZN9-APF25 | 2 |
| For 410 × 410 mm | ZN9-APF41 | 1 | |
| For 610 × 610 mm | ZN9-APF61 | 1 |
Ionizers
Ionizers
| Appearance | Application | Power supply | Model |
| 250 × 250 mm |
Supplied from Air Clean Unit. | ZN-J25A |
| 410 × 410 mm | ZN-J41A |
Accessories
| Model | Qty. | |
| Replacement Discharge Needles | ZN9-JH04 | 4 per pack |
Single-sided Connector Cables
(for DC power supply or I/O connection)
| Cable length | Model | Qty. |
| 2 m | ZN9-JC02 | 1 |
Air Particle Sensors
Sensor Head
| Appearance | Measured particle diameter | Model |
 | 0.3, 0.5, and 1.0 µm | ZN-PD03 |
Amplifiers
| Appearance | Power supply | Connection method | Model |
 | 24 VDC | Cable connection | ZN-PDA11 2M |
| Supplied from the Air Clean Unit. | Connector connection (Air Clean Unit feedback connection) | ZN-PDA12 2M |
Calculating Unit
| Appearance | Model |
 | ZX-CAL2 |
Note: Be sure to use when connecting amplifier units.
Clean Monitoring Systems
| Appearance | Contents | Connection method | Model |
 | ZN-SF11 Interface Unit + Realtime Clean Air Monitor | For RS-232C connection with personal computer only |
ZN-SFW11 |
 | ZN-SF12 Interface Unit + Realtime Clean Air Monitor | For RS-232C connection with personal computer or Air Clean Unit feedback connection |
ZN-SFW12 |
Double-sided Connector Cable (for extension between Sensor Head and Amplifier)
| Cable length | Model | Qty. |
| 1 m | ZX-XC1A | 1 |
| 4 m | ZX-XC4A | 1 |
| 8 m | ZX-XC8A | 1 |
| Model | Qty. | |
| Sensor Head Replacement Filter Set | ZN9-PF1 | 1 |
| Cleaning Filter | ZN9-PC1 | 1 |
| Head Attachment Tool | ZN9-PB1 | 1 |
Specifications:
Air Clean Units
| Item Model | ZN-A2502D | ZN-A4105D | ZN-A6112 | ZN-A6112P | |
| Air outlet dimensions | 225 × 205 mm | 360 × 360 mm | 578 × 568 mm | ||
| Main filter/Removal rate | HEPA filter/ 99.99% of particles 0.3 μm and larger | ||||
| Air volume | 0.3 to 1.8 m3/min (TYP.) | 1 to 5 m3/min (TYP.) | 4 to 12 m3/min (TYP.) | ||
| Power supply voltage | 24V DC ±10%, ripple(p-p) 10% max. | ||||
| Current consumption | Airflow level 5: 2.1 A max. (RMS value)/(Peak: 3 A) | Airflow level 5: 3.5 A max. (RMS value)/(Peak: 5.5 A) | Airflow level 5: 24V DC: 4.3 A max. (RMS value)/(Peak: 8 A) | ||
| Airflow levels | 5 levels • Settable by button operation • Settable by serial (RS-422 or RS-485 *1) communications | 5 levels • Settable by button operation • Settable by serial (RS-422 or RS-485 *1) communications • Settable by ON/OFF signal input (3 levels) *2 | |||
| Running noise | Airflow level 3: 53 dB (TYP.) | Airflow level 3: 58 dB (TYP.) | |||
| Fan motor | Compact DC brushless centrifugal blower × 2 | DC brushless turbo fan × 1 | DC brushless turbo fan × 1 | ||
| Indicator lamps | Operating status: Green/Red | Air volume: Blue | |||
| Filter clogging detection | Yes | No | Yes | ||
|
External output | Alarm output 1: Alarm output 1 turns OFF when one of the following events occurs. (Normally alarm output 1 is ON.) (Check indicator to find out which event occurred.) • Filter is clogged. • Fan error • Cleaning alarm for discharge needle (when ZN-J-series Ionizer (sold separately) is connected) • Discharge error (when ZN-J-series Ionizer (sold separately) is connected) Alarm output 2: Enabled only when ZN-J-series Ionizer (sold separately) is connected. • Alarm output 2 turns OFF to indicate that cleaning is necessary for ZN-J Series discharge needles. (Normally alarm output 2 is ON.) |
Fan operation alarm output Alarm output OFF in below cases (ON during normal operation) • Fan not rotating (Including when power is OFF or on standby) • Trouble • Clogged filter (ZN-A6112P only) | |||
| 30 VDC, 50 mA max. Residual voltage: 1 V max. with load current of 10 mA, 2 V max. with load current of 50 mA. | |||||
| Applicable Ionizer Unit (Optional) | ZN-J25A | ZN-J41A | None | ||
| Ambient temperature range | Operating and storage: 0 to 40°C (with no icing or condensation) | ||||
| Ambient humidity range | Operating and storage: 35 to 85% (with no icing or condensation) | ||||
| Applicable contamination degree | 2 | ||||
| Material | Top: Antistatic plastic, Bottom: SECC | Top: ABS, HEPA filter frame: Aluminum | |||
| Outer dimensions (mm) | 250 (W) × 250 (D) × 97.5 (H) | 410 (W) × 410 (D) × 129.5 (H) | 714.4 (W) × 654.4 (D) × 174.3 (H) (Height off installation surface: 117.3) | ||
| Weight (Packaged) | Approx. 2 kg (Approx. 3.3 kg) | Approx. 5.2 kg (Approx. 8.6 kg) | Approx. 12.5 kg (Approx. 17 kg) | ||
| Accessories | Instruction Sheet, Sealing parts, Mounting screws, I/O connector (XW4B-06B1-H1) | Instruction Sheet, Sealing parts, Mounting screws, I/O connector (XW4B-10B1-H1) | |||
*1 Use the dip switches on the unit surface (connector surface) to switch between RS-422 and RS-485.
*2 Contact input: 5 mA max. ON current. Use input device of 30 V or higher withstand voltage
Ionizers:
| Item Model | ZN-J25A | ZN-J41A | |
| Applicable Air Clean Unit | ZN-A2502D | ZN-A4105D | |
| Power supply voltage | 24V DC ±10%, Ripple (p-p):10% max. | ||
| Current consumption | 300 mA max. | ||
| Discharge voltage | ±7 kV max. | ||
| Discharge method | Variable DC discharge | ||
| Static electricity removal time (Typical) *1 | 5 s max. | ||
| Ion balance (Typical) *2 | ±30 V max. | ||
| Indicator lamps | Power (green), Cleaning notice (orange flashing), Cleaning alarm (orange), High voltage error (red) | ||
| External output | High voltage error, cleaning outputs: Output from photo MOS relay (30V DC, 300 mA max.) | ||
| Functions | Manual adjustment of ion balance, cleaning required detection, high voltage detection | ||
| Ambient temperature range | Operating and storage: 0 to 40°C (with no icing or condensation) | ||
| Ambient humidity range | Operating and storage: 35% to 65% (with no condensation) | ||
| Materials | Body: ABS, Needles: Tungsten | ||
| Outer dimensions (mm) | 248 (W) × 310 (D) × 45 (H) | 408 (W) × 470 (D) × 45 (H) | |
| Weight (Packaged) | Approx. 0.6 kg (Approx. 1.4 kg) | Approx. 1.5 kg (Approx. 2.7 kg) | |
| Accessories | Instruction Sheet, Sealing parts, Mounting screws, Connector cable for Air Clean Unit, English warning label | ||
Measurement conditions:
- Distance: 300 mm
- Air Clean Unit: ZN-A Series with airflow level 5 at center of air outlet
- Discharging from ±1000 V to ±100 V with a charge plate monitor (150 × 150 mm, 20 pF)
- Temperature: 18 to 28˚C,
- Humidity: 35 to 55%
Performance may not be satisfied if gases such as from solvents are in the measurement area.
Measurement conditions:
- Distance: 300 mm
- Air Clean Unit: ZN-A Series with airflow level 5 at center of air outlet Measured for 10 sec by a charge plate monitor (150 × 150 mm, 20 pF)
- Temperature: 18 to 28˚C,
- Humidity: 35 to 55%
Performance may not be satisfied if gases such as from solvents are in the measurement area.
Specifications:
Air Particle Sensors
Sensor Head
| Item Model | ZN-PD03 |
| Applicable Amplifier | ZN-PDA11/ZN-PDA12 |
| Measurement method | 90° sideways light-scattering method |
| Light source | Semiconductor laser |
| Applicable particle size | 0.3, 0.5, or 1.0 mm min. |
| Applicable cleanliness class | Equivalent to Class 100 to 100,000 (FED-STD-209D) |
| Indicator | Level indicator for Class 100 to 100,000 (FED-STD-209D) |
| Connection tube | Inner diameter: 4, Length: 1 m max. |
| Ambient temperature range | Operating: 0 to 40°C, Storage: -15 to 50°C (with no icing or condensation) |
| Ambient humidity range | Operating and storage: 35% to 85% (with no condensation) |
| Dielectric strength | 1,000 VAC, 50/60 Hz for 1 min |
| Vibration resistance | 10 to 55 Hz, 0.7-mm double amplitude 80 min each in X, Y, and Z directions |
| Shock resistance | 150 m/s2 3 times each in six directions (up/down, left/right, forward/backward) |
| Connection method | Connector cable (standard cable length: 0.5 m) |
| Material | ABS |
| Weight | Approx. 300 g (Packed state: Approx. 450 g) |
| Accessories | Instruction Sheet, connection tube |
Amplifiers
| Item Model | ZN-PDA11 | ZN-PDA12 |
| Sampling time | 1 to 599 s (selectable) | |
| Average count setting | 1, 2, 4, 8, 16, 32, or 64 | |
| Indicators | Operation indicators: OUT1 (orange), OUT2 (yellow), 7-segment main display (red), 7-segment sub-display (yellow), power (green), wide range display (green), unit selection display (green) | 7-segment main display (red), 7-segment sub-display (yellow), power (green), wide range display (green), unit selection display (green) |
| Status outputs (2 outputs: OUT1/OUT2) (See note.) | NPN open-collector outputs, 30 VDC, 30 mA max., Residual voltage: 1.2 V max. | — |
| Reset input (See note.) | ON: Short-circuited with 0-V terminal or 1.5 V or less, OFF: Open | — |
| Functions | Measurement result display, Setting value display, Unit selection, Scaling, Peak hold, Hysteresis setting, Threshold level selection, Wide range display, Key lock, ECO mode, Display reverse, Display digit change, Initialize | Measurement result display, Communications condition display, Unit selection, Scaling, Air Clean Unit automatic control, Air Clean Unit air level change, Threshold level selection, Wide range display, Key lock, ECO mode, Display reverse, Display digit change, Initialize |
| Communications with Air Clean Unit | — | Unique communications specifications (RJ-45 connector and straight LAN cable) |
| Power supply voltage | 24 VDC ±10%, Ripple (p-p): 10% max. | 24 VDC ±10%, Ripple (p-p): 10% max. (Supplied from Air Clean Unit.) |
| Current consumption | 300 mA max. | |
| Ambient temperature range | Operating: 0 to 40°C , Storage: -15 to 50°C (with no icing or condensation) | |
| Ambient humidity range | Operating and storage: 35% to 85% (with no condensation) | |
| Insulation resistance | 20 MÙ min. at 500 VDC | |
| Dielectric strength | 1,000 VAC, 50/60 Hz for 1 min | |
| Vibration resistance | 10 to 150 Hz, 0.7-mm double amplitude 80 min each in X, Y, and Z directions | |
| Shock resistance | 300 m/s2 3 times each in six directions (up/down, left/right, forward/backward) | |
| Connection method | Cable (standard cable length: 2 m) | Connector cable (standard cable length: 2 m) |
| Materials | Case: PBT (polybutylene terephthalate), Cover: Polycarbonate | |
| Weight | Approx. 180 g (Packed state: Approx. 350 g) | |
| Accessories | Instruction Sheet | |
Note: OUT2 and the reset input are switched by using the DIP switch on the bottom of the Amplifier.
Clean Monitoring Systems:
| Item Model | ZN-SFW11 | ZN-SFW12 | |
| Power supply voltage | Supplied from the ZN-PDA. | ||
| Current consumption | 45 mA max. with 24-VDC power supply voltage (excluding current consumption and current output of the Amplifier) | ||
| Applicable Amplifiers | ZX Series, ZJ-SD Series, ZN-PD Series | ||
| Applicable Amplifier Unit software versions | ZX-LDA@@-N V1.000 or higher, ZX-EDA@@ V1.300 or higher, ZX-TDA@@ V1.100 or higher, ZJ-SDA@@ V1.000 or higher, or ZN-PDA@@ V1.000 or higher | ||
| No. of connectable Amplifiers | 10 max. (For ZN-PDA) | ||
| Indicator | Power: Green, Sensor communications: Green, Sensor communications error: Red, External terminal communications: Green, External terminal communications error: Red | Power (POWER: Green), Serial communications (STA1: Green) Not clean (OPE1: Orange), Clean (OPE2: Green) | |
| Functions | — | Automatic control for Air Clean Units (multi-unit system control), Air level change for Air Clean Units | |
|
Commu- nications | Communications port | RS-232C (9-pin, D-Sub connector) | |
| Protocol | CompoWay/F | ||
| Baud rate | 38,400 bps | ||
| Data configuration | Data bits: 8, Parity: None, Start bits: 1, Stop bits: 1, Flow control: None | ||
| For external device 2 | — | Unique communications specifications (RJ-45 connector and straight LAN cable) | |
| Ambient temperature range | Operating: 0 to 40°C, Storage: -15 to 50°C (with no icing or condensation) | ||
| Ambient humidity range | Operating and storage: 35% to 85% (with no condensation) | ||
| Insulation resistance | 20 MÙ min. at 500 VDC | ||
| Dielectric strength | 1,000 VAC, 50/60 Hz for 1 min | ||
| Vibration resistance | 10 to 150 Hz, 0.7-mm double amplitude 80 min each in X, Y, and Z directions | ||
| Shock resistance | 300 m/s2 3 times each in six directions (up/down, left/right, forward/backward) | ||
| Connection method | — | Connector cable (standard cable length: 2 m) | |
| Materials | Case: PBT (polybutylene terephthalate), Cover: Polycarbonate | ||
| Weight | Approx. 100 g (Packed state: Approx. 480 g) | Approx. 200 g (Packed state: Approx. 550 g) | |
| Accessories | Instruction Sheet, Two clamps | ||
Dimensions:
Air Clean Units
Air Clean Units:
Dimensions:
Air Particle Sensors
Interface Unit:
This document provides information mainly for selecting suitable models. Please read the document System Manual (Z267) carefully for information that the user must understand and accept before purchase, including information on warranty, limitations of liability, and precautions.
OMRON Corporation
Industrial Automation Company Sensing Devices Division H.Q. Application Sensors Division
Shiokoji Horikawa, Shimogyo-ku,
Kyoto, 600-8530 Japan
Tel: (81) 75-344-7068/Fax: (81) 75-344-7107
Regional Headquarters
OMRON EUROPE B.V.
Sensor Business Unit
Carl-Benz-Str. 4, D-71154 Nufringen, Germany
Tel: (49) 7032-811-0/Fax: (49) 7032-811-199
OMRON ELECTRONICS LLC
One Commerce Drive Schaumburg,
IL 60173-5302 U.S.A.
Tel: (1) 847-843-7900/Fax: (1) 847-843-7787
OMRON ASIA PACIFIC PTE. LTD.
No. 438A Alexandra Road # 05-05/08 (Lobby 2), Alexandra Technopark, Singapore 119967
Tel: (65) 6835-3011/Fax: (65) 6835-2711
OMRON (CHINA) CO., LTD.
Room 2211, Bank of China Tower,
200 Yin Cheng Zhong Road,
PuDong New Area, Shanghai, 200120, China Tel: (86) 21-5037-2222/Fax: (86) 21-5037-2200
OMRON Industrial Automation Global: www.ia.omron.com
