COREMORROW 21067 Piezo Linear Actuator
Introduction
The 21067 piezoelectric linear actuator combines manual coarse adjustment and piezo fine adjustment. The manual adjustment stroke can reach 9.53mm and the fine adjustment stroke is 16μm.
Characteristics
- Coarse adjustment 9.53mm
- Fine adjustment 16μm
- Combination of manual and piezo adjustment
Applications
- Mirror adjustment frame
- Profilometry
- Nanolithography
- Nanotechnology and metrology
- Motion platform driver
- Scientific research, etc.
- Surface measurement technique
- Motion in strong magnetic fields or vaccum
Technical Data
| Type | 21067 | Units |
| Manual motion range | 9.53 | mm |
| Piezo motion range (0~150V) | 16 | μm±20% |
| Piezo drive voltage | 0~150 | V |
| El.capacitance | 0.8 | μF±20% |
| Operating temperature[1] | -25~85 | ℃ |
| Material | Steel | |
| Cable length[2] | – | m±10mm |
| Voltage connector[2] | – | |
| Recommended controller | E53.A、E53.C、E63.C |
Remarks：
- Custom is available.
- Custom cable lengths and connectors ara available.
Drawing
Recommended Controllers
E53.A
Small size, easy integration, open loop 1-channel output, Ave. current 60mA Analog control
E63.C
Small volume, single channel, open loop 1-channel output, Ave. current 2.5mA USB
Harbin Core Tomorrow Science & Technology Co., Ltd.
Tel: +86-451-86268790 Email: [email protected] Fax: +86-451-86267847 Web: www.coremorrow.com. Headquarters: Building I2, No.191 Xuefu Road, Nangang District, Harbin Shanghai Office: Building 2, No.608 Shengxia Road, Pudong District, Shanghai.
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